198th Meeting - Phoenix, Arizona

October 22-27, 2000


V1 - Microfabricated Systems and MEMS V

Sensor Division/ Dielectric Science and Technology Division/ Electronics Division

Tuesday, October 24, 2000

Tucson 42

Co-Chairs: P.J. Hesketh and A.B. Frazier

8:301123 The Microfactory System Using Electrochemical Machining - M. Suda, K. Furuta, T. Sakuhara, and T. Akata (Seiko Insturuments Inc.) PDF
9:001124 Electroplated Nanocrystalline Nickel-Iron Alloys as a New Powerful Material for Microstructured Molding Tools - A. Fath, W. Leskopf, K. Bade, and W. Bacher (Forschungszentrum Karlsruhe) PDF
9:201125 Auto-Catalytic Co(W,P) Deposition in Micro-Tunnels - N. Petrov, N. Kalinichenko, and Y. Shacham-Diamand (Tel-Aviv University) PDF
9:401126 Active Surface Formation by Wet Chemical Pretreatment for Acceleration of Electroless Ni Deposition on Si(100) Wafers - N. Takano, D. Niwa, T. Yamada, and T. Osaka (Waseda University) PDF
10:10 Twenty-Minute Intermission
10:301127 Micro-Hydraulics Employing Non-wetting Fluids - P. Wapner (Air Force Research Laboratory) and W. Hoffman (Air Force Laboratory) PDF
10:501128 Lateral Etch Study of Thin Films using Hydrofluoric Acid Chemistries for MEMS Devices - G. Matamis (Motorola MOS-5), B. Gogoi (Motorola Sensor Products), and C.-C. Wang (University of Michigan) PDF
11:101129 Low Surface Tension Etching Solutions for Silicon Dioxide Removal in Microelectromechanical Systems - M.J. Parent, L. Zazzera, P. Rajtar, and F. Behr (3M) PDF
11:301130 Hybrid Micromachining and Surface Microstructuring of Alumina Ceramic - P. Mardilovich, D. Routkevitch, and A. Govyadinov (Nanomaterials Research Corp.) PDF

Co-Chairs: H.G. Hughes and D. Misra

2:001131 Micro Scale Purification Systems for Biological Sample Preparation - A.B. Frazier, T.L. Edwards (Georgia Institute of Technology), and B.K. Gale (Louisiana Tech University) PDF
2:301132 Challenges and Solutions for Packaging MEMS and Microsystems - J. Neysmith and D.F. Baldwin (Georgia Institute of Technology) GIF
3:001133 Fabrication and Characterization of Plastic Microfluidic Devices Modified with Polyelectrolyte Multilayers - L. Locascio, S. Barker, D. Ross, E. Waddell, M. Tarlov, and M. Gaitan (NIST) PDF
3:201134 Bulk-Etched Integrated Mesoscopic Fluidic Interconnects for Fluidic Microdevices - J. Scalf, D. Liepmann, and A. Pisano (University of California, Berkeley) PDF
3:40 Ten-Minute Intermission
3:501135 Electro-Magnetically Actuated Diverting Valve Using LTCC Tapes - P. Espinoza-Vallejos, J. Santiago-Aviles (University of Pennsylvania), and L. Sola-Laguna (DuPont Electronics Materials) PDF
4:101136 MEMS Magnetic Bi-Stable Valve - D.S. Creyts, IV and P.J. Hesketh (Georgia Institute of Technology) GIF
4:301137 Adhesive Bonding for Wafer Scale Packaging of Fluidic Microsystems - X. Ma, B. Gierhart, S. Collins, and R. Smith (University of California, Davis) PDF

Wednesday, October 25, 2000

Co-Chairs: W.E. Bailey and G. Hunter

10:001138 Intelligent Micromachines: Keys to the Next Silicon Revolution - P. McWhorter (Sandia National Laboratories) PDF
10:401139 Inertial Sensors: The Drive for Aspect Ratio - P. Bergstrom (Motorola SPS) PDF
11:101140 Residual Stress Effect and Improvement Method on the Performance of Diaphragm-Based Piezoelectric Microphones - M. Niu and E.S. Kim (University of Hawaii) PDF
11:301141 A Post-Processing Method for Suppressing the Residual Mechanical Stree in CMOS' Layers, for MEMS Applications - B. Ghodsian (The Titan Corporation) and V. Milanovic (Univerisity of California, Berkleley) GIF

Co-Chairs: B. Hughes and S.S. Ang

2:001142 Chemical Microsensors for Aerospace Applications - G. Hunter, P. Neudeck, G. Fralick (Nasa Glenn Research Center), C. Liu, Q. Wu, M. Sawayda, Z. Jin, J. Hammond (Case Western Reserve University), D. Makel (Makel Engineering), W. Rauch, M. Liu (Georgia Institute of Technology), and G. Hall (Nasa John F. Kennedy Space Center) PDF
2:301143 A MEMS Based Hybrid Preconcentrator/Chemiresistor Chemical Sensor - R. Hughes, S. Patel, and R. Manginell (Sandia National Labs) PDF
3:001144 Development of a Multichannel Quartz Crystal Microbalance (MQCM) for Simultaneous Multicomponent Analysis - N. Oyama, Y. Ohtomo, O. Hatozaki (Tokyo University of Agriculture & Technology), K. Kitakizaki, Y. Watanabe, and M. Haba (Meidensha Corporation) PDF
3:30 Ten-Minute Intermission
3:401145 Micro-Hotplate, an Useful Concept for Gas Sensing, Fluidics and Space Applications - D. Briand, O. Guenat, B. van der Schoot, T. Hirata (University of Neuchatel), and N.F. de Rooij (Sumitomo Heavy Industries, Ltd.) PDF
4:001146 Development of Electrochemical Sensors Based on Microelectrode Arrays for Environmental Monitoring - C. Madore (CSEM) PDF
4:201147 MicroSystems Development - S. Collins and R. Smith (University of California, Davis) PDF
4:401148 FET Based pH and Nitrate Checkers for Acid-Rain Monitoring - S.-I. Wakida, M. Yamane, S. Takeda, Z. Siroma, Y. Tsujimura (Osaka National Research Institute), and J. Liu (Beijing University of Aeronautics and Astronautics) PDF

Thursday, October 26, 2000

Co-Chairs: G. Maracas and P. Bergstrom

9:001149 Template-Prepared Bio/Nano Tubules for Chemical Separations and Analysis - C. Martin, S.B. Lee, M. Kang, E. Steinle (University of Florida), and B. Lakshmi (3M Company) PDF
9:201150 Microfabricated PMMA Structure for DNA Preconcentration and Electrophoresis - Y.-C. Lin, C.-K. Tseng, and S.-Q. Hou (National Cheng Kung University) PDF
9:401151 Immobilization of DNA Copolymers on Microhotplates for DNA Melting and Hybridization Reactions - T.H. Huang, R. Cavicchi, S. Barker, and M.J. Tarlov (National Institute of Standards and Technology) PDF
10:00 Twenty-Minute Intermission
10:201152 Increased Pseudoinductance in Paired Mixtures of Biopolymers is a Model for Twin Wire Mutual Inductance in RNA and DNA - M. Garnett and J.L. Remo (Garnett McKeen Laboratory, Inc.) GIF
10:401153 Selective Deposition of Octasubstituted Phthalocyanine Materials Based on Hydrophobic/Hydrophilic Surface Interactions - R. Zangmeister and N. Armstrong (University of Arizona) PDF
11:001154 The Effects of Electron Bombardment on Organic Monolayers Adsorbed on Si(111) - T. Yamada, N. Takano, K. Yamada, S. Yoshitomi, T. Inoue, and T. Osaka (Waseda University) PDF

Co-Chairs: H. Denton and H.G. Hughes

2:001155 Evaluation of Organic Monolayers Formed on Si(111) Towards Nanometer Scale Fabrication - N. Takano, K. Yamada, S. Yoshitomi, T. Inoue, T. Yamada, and T. Osaka (Waseda University) PDF
2:201156 Nanomechanical Detection of Biomolecular Interactions - K. Hansen (Oak Ridge National Laboratory), G. Wu (University of California, Berkeley), H.-F. Ji, T. Thundat (Oak Ridge National Laboratory), R. Datar, R. Cote (University of Southern California), and A. Majumdar (University of California, Berkeley) PDF
2:401157 Ultra-Sensative Resonant Frequency Based Mass Detector - B. Ilic, D. Czaplewski, G. Craighead, C. Campagnolo, C. Batt (Cornell University), and P. Neuzil (Institute of Microelectronics) GIF
3:001158 Developing A u-Fabrication Course: A Study in Multidisciplinary MEMS Curriculum Development - R.S. Evans and P.J. Hesketh (Georgia Institute of Technology) GIF
3:20 Ten-Minute Intermission
3:401159 Microstructures for Monitoring Wafer Uniformity of Reactive Ion Etching - R. Leung, D. Howard, S. Collins, and R. Smith (University of California, Davis) PDF
4:001160 Water Dispersible Silanes for Wettability Modification of Polysilicon - A.M. Almanza-Workman, S. Raghavan, P. Deymier (University of Arizona), D. Monk, and R. Roop (Motorola Inc.) PDF
4:201161 Correlation of Metal Film Grain Size to Optical Measurement Results - T. Robinson (KLA-Tencor Corporation) and J. Sledziewski (Analog Devices Incorporated) PDF
4:401162 Measurement of MEMs Cantilever Curvature Using Spectroscopic Optical Techniques - T. Robinson (KLA-Tencor Corporation) and J. Sledziewski (Analog Devices Incorporated) PDF