207th ECS Meeting - Quebec City, Canada |
May 15 - May 20, 2005 |
PROGRAM INFORMATION |
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G1 - Second International Symposium on Science and Technology of Dielectrics in Emerging Fields |
Dielectric Science and Technology/Electronics and Photonics |
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Monday, May 16, 2005 |
Room 206B, Level 2, Quebec City Convention Center |
Thin Film Devices |
| Co-Chairs: D. Misra & S. Mukherjee |
| Time | Abs# | Title and Authors |
| 10:00 |
376
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The Importance of the Gate Dielectric in Organic and Polymeric Thin-Film Transistors
J. Deen and O. Marinov (McMaster University)
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| 10:40 |
377
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Use of Carbon Nanotubes in Modifying the Properties of Inherently Conducting Polymers
G. Wallace, G. Wallace, O. Ngamna, S. Moulton and C. Lynam (University of Wollongong)
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| 11:00 |
378
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Amorphous Siliocn Integration on Plastic for Lexible Displays
A. Nathan, D. Striakhilev, P. Servati and A. Sazonov (University of Waterloo)
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| 11:40 |
379
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Dielectric Properties of Strained Meso-Porous Silicon.
B. Remaki, C. Populaire, B. Remaki, V. Lysenko and D. Barbier (INSA de Lyon)
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Electronic Devices and Materials |
| Co-Chairs: K. Worhoff & A. Nathan |
| Time | Abs# | Title and Authors |
| 14:00 |
380
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High Capacitance Density Thin Films on Metal Foils for Embedded Capacitor Applications : A Review
S. Mukherjee, W. Borland and S. Suh (DuPont Electronic Technologies)
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| 14:40 |
381
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A Low-k Copper Diffusion Barrier for 45nm and Beyond
A. Lee, N. Iwasaki, M. Le, L. Xia, D. Witty and H. M'Saad (Applied Materials)
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| 15:00 |
382
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Ge MOS Devices with Thermally Evaporated HfO2 as Gate Dielectric
R. Garg, D. Misra (New Jersey Institute of Technology) and P. Swain (Sarnoff Corporation)
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| 15:20 |
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Intermission (20 Minutes)
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| 15:40 |
383
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ISSG-SiNgen ONO Stack for NROM Memory:Electrical and Chemical Characterization
A. Heiman, M. Lisiansky, Y. Roizin (Tower Semiconductor Ltd), G. Gartiez, E. Alon, A. Fenigstein, R. Edrei, A. Hoffman (Tower Semiconductor), R. Brenner (Technion-Israel Institute of Technology), A. Gladkikh, M. Oksman (Tel Aviv University), G. Xing and G. Cautiero (Applied Materials)
|
| 16:00 |
384
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Microwave Dielectric Relaxation of the Polycrystalline (Ba,Sr)TiO3 Thin Films
T. Moon, B. Lee, T. Kim and B. Park (Seoul National University)
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| 16:20 |
385
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Preparation and Electrical Properties of Pb(Zr0.9Ti0.1)O3/Pb(Zr0.1Ti0.9)O3 Multilayer Thin Films by Dual-gun RF Magnetron Sputtering
S. Lin, C. Lai, S. Lin (National Tsing Hua University) and S. Chang (National Chung Hsing University)
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| 16:40 |
386
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Study on Nanometer Thick BST Material by Simulation for DRAM Application
V. Saaminathan (Multimedia University) and S. Rajendra (Multimedia Unviersity)
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| 17:00 |
387
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Dielectric Relaxation of ALD HfO2 Thin Films from 1 kHz to 5 GHz
B. Lee, T. Moon, T. Kim (Seoul National University), D. Choi (Hanyang University) and B. Park (Seoul National University)
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Tuesday, May 17, 2005 |
Room 206B, Level 2, Quebec City Convention Center |
Thin Film Photonics |
| Co-Chairs: K. Sundaram & J. Deen |
| Time | Abs# | Title and Authors |
| 14:00 |
388
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Plasma-Based Inhomogeneous Dielectric Film Systems for Optics and Photonics: Spectroscopic Ellipsometry Studies
L. Martinu, A. Amassian, J. Lamarre, S. Larouche, J. Masse (Ecole Polytechnique) and R. Vernhes (Ecole polyetchnique)
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| 14:40 |
389
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Fibre-coupled High-index PECVD Silicon-oxynitride Waveguides on Silicon
M. Fadel (University of Dortmund) and E. Voges (University of Dortmund, High Frequency Institute)
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| 15:00 |
390
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Luminescence Spectroscopy of Thin Oxide Films Grown by Atomic Layer Deposition
M. Kirm (University of Tartu), E. Feldbach, J. Aarik, S. Lange, H. Mandar and T. Uustare (Institute of Physics,University of Tartu)
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| 15:20 |
391
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Technology and Reliability Challenges of Sub-nm High EOT High-k/ Metal Gate Electrode Transistors
J. Peterson (SEMATECH), P. Kirsch (IBM), G. Bersuker, S. Krishnan, P. Mahji, P. Lysaght (SEMATECH), M. Quevedo-Lopez (Texas Instruments), H. Li (Infineon), Y. Senzaki (SEMATECH), R. Harris (AMD), C. Young, R. Choi, J. Sim, J. Barnett (SEMATECH), N. Moumen (IBM), C. Huffman (Texas Instruments), M. Gardner (AMD), G. Brown, P. Zeitzoff (SEMATECH), B. Lee, C. Ramiller (IBM) and H. Huff (SEMATECH)
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Rooms 200A/200B/200C, Level 2, Quebec City Convention Center |
Tuesday Evening Poster Session |
| Co-Chairs: P. Mascher & L. Martinu |
| Time | Abs# | Title and Authors |
| o |
392
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Effect of Ta Content on The Ferroelectric Characteristics of SBT Thin Films
F. Hsu, C. Hu (National Tsing Hua University), C. Leu and C. Chien (National Nano Device Laboratories)
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| o |
393
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Thickness Effect of BaPbO3 Buffer Layers on the Ferroelectric Properties of PZT Thin Films
C. Liang and J. Wu (National Tsing Hua University)
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| o |
394
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Rare Earth Doped Nanoparticles in Organic and Inorganic Host Materials for Application in Integrated Optics
R. Dekker, L. Hilderink, M. Diemeer (University of Twente), W. Stouwdam, V. Sudarsan, F. van Veggel (University of Victoria), K. Worhoff and A. Driessen (University of Twente)
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