207th ECS Meeting - Quebec City, Canada

May 15 - May 20, 2005

PROGRAM INFORMATION

 

G1 - Second International Symposium on Science and Technology of Dielectrics in Emerging Fields

Dielectric Science and Technology/Electronics and Photonics

 

Monday, May 16, 2005

Room 206B, Level 2, Quebec City Convention Center

Thin Film Devices

Co-Chairs: D. Misra & S. Mukherjee
TimeAbs#Title and Authors
10:00 376 The Importance of the Gate Dielectric in Organic and Polymeric Thin-Film Transistors J. Deen and O. Marinov (McMaster University)
10:40 377 Use of Carbon Nanotubes in Modifying the Properties of Inherently Conducting Polymers G. Wallace, G. Wallace, O. Ngamna, S. Moulton and C. Lynam (University of Wollongong)
11:00 378 Amorphous Siliocn Integration on Plastic for Lexible Displays A. Nathan, D. Striakhilev, P. Servati and A. Sazonov (University of Waterloo)
11:40 379 Dielectric Properties of Strained Meso-Porous Silicon. B. Remaki, C. Populaire, B. Remaki, V. Lysenko and D. Barbier (INSA de Lyon)
 

Electronic Devices and Materials

Co-Chairs: K. Worhoff & A. Nathan
TimeAbs#Title and Authors
14:00 380 High Capacitance Density Thin Films on Metal Foils for Embedded Capacitor Applications : A Review S. Mukherjee, W. Borland and S. Suh (DuPont Electronic Technologies)
14:40 381 A Low-k Copper Diffusion Barrier for 45nm and Beyond A. Lee, N. Iwasaki, M. Le, L. Xia, D. Witty and H. M'Saad (Applied Materials)
15:00 382 Ge MOS Devices with Thermally Evaporated HfO2 as Gate Dielectric R. Garg, D. Misra (New Jersey Institute of Technology) and P. Swain (Sarnoff Corporation)
15:20 Intermission (20 Minutes)
15:40 383 ISSG-SiNgen ONO Stack for NROM Memory:Electrical and Chemical Characterization A. Heiman, M. Lisiansky, Y. Roizin (Tower Semiconductor Ltd), G. Gartiez, E. Alon, A. Fenigstein, R. Edrei, A. Hoffman (Tower Semiconductor), R. Brenner (Technion-Israel Institute of Technology), A. Gladkikh, M. Oksman (Tel Aviv University), G. Xing and G. Cautiero (Applied Materials)
16:00 384 Microwave Dielectric Relaxation of the Polycrystalline (Ba,Sr)TiO3 Thin Films T. Moon, B. Lee, T. Kim and B. Park (Seoul National University)
16:20 385 Preparation and Electrical Properties of Pb(Zr0.9Ti0.1)O3/Pb(Zr0.1Ti0.9)O3 Multilayer Thin Films by Dual-gun RF Magnetron Sputtering S. Lin, C. Lai, S. Lin (National Tsing Hua University) and S. Chang (National Chung Hsing University)
16:40 386 Study on Nanometer Thick BST Material by Simulation for DRAM Application V. Saaminathan (Multimedia University) and S. Rajendra (Multimedia Unviersity)
17:00 387 Dielectric Relaxation of ALD HfO2 Thin Films from 1 kHz to 5 GHz B. Lee, T. Moon, T. Kim (Seoul National University), D. Choi (Hanyang University) and B. Park (Seoul National University)
 

Tuesday, May 17, 2005

Room 206B, Level 2, Quebec City Convention Center

Thin Film Photonics

Co-Chairs: K. Sundaram & J. Deen
TimeAbs#Title and Authors
14:00 388 Plasma-Based Inhomogeneous Dielectric Film Systems for Optics and Photonics: Spectroscopic Ellipsometry Studies L. Martinu, A. Amassian, J. Lamarre, S. Larouche, J. Masse (Ecole Polytechnique) and R. Vernhes (Ecole polyetchnique)
14:40 389 Fibre-coupled High-index PECVD Silicon-oxynitride Waveguides on Silicon M. Fadel (University of Dortmund) and E. Voges (University of Dortmund, High Frequency Institute)
15:00 390 Luminescence Spectroscopy of Thin Oxide Films Grown by Atomic Layer Deposition M. Kirm (University of Tartu), E. Feldbach, J. Aarik, S. Lange, H. Mandar and T. Uustare (Institute of Physics,University of Tartu)
15:20 391 Technology and Reliability Challenges of Sub-nm High EOT High-k/ Metal Gate Electrode Transistors J. Peterson (SEMATECH), P. Kirsch (IBM), G. Bersuker, S. Krishnan, P. Mahji, P. Lysaght (SEMATECH), M. Quevedo-Lopez (Texas Instruments), H. Li (Infineon), Y. Senzaki (SEMATECH), R. Harris (AMD), C. Young, R. Choi, J. Sim, J. Barnett (SEMATECH), N. Moumen (IBM), C. Huffman (Texas Instruments), M. Gardner (AMD), G. Brown, P. Zeitzoff (SEMATECH), B. Lee, C. Ramiller (IBM) and H. Huff (SEMATECH)
 

Rooms 200A/200B/200C, Level 2, Quebec City Convention Center

Tuesday Evening Poster Session

Co-Chairs: P. Mascher & L. Martinu
TimeAbs#Title and Authors
o 392 Effect of Ta Content on The Ferroelectric Characteristics of SBT Thin Films F. Hsu, C. Hu (National Tsing Hua University), C. Leu and C. Chien (National Nano Device Laboratories)
o 393 Thickness Effect of BaPbO3 Buffer Layers on the Ferroelectric Properties of PZT Thin Films C. Liang and J. Wu (National Tsing Hua University)
o 394 Rare Earth Doped Nanoparticles in Organic and Inorganic Host Materials for Application in Integrated Optics R. Dekker, L. Hilderink, M. Diemeer (University of Twente), W. Stouwdam, V. Sudarsan, F. van Veggel (University of Victoria), K. Worhoff and A. Driessen (University of Twente)