210th ECS Meeting - Cancun, Mexico

October 29 - November 03, 2006

PROGRAM INFORMATION
 

J3 - Microfabricated and Nanofabricated Systems MEMS/NEMS 7

Sensor/Dielectric Science and Technology/Electronics and Photonics
 

Tuesday, October 31, 2006

Universal Ballroom, 2nd Floor, Expo Center

Tuesday Evening Poster Session

Co-Chairs: P. Hesketh and J. Davidson
TimeAbs#Title and Authors
o 2136 Influence of Self Affine Roughness of Wires on Atom Chips Z. Moktadir, G. Lewis, C. Gollasch, M. Kraft (Southampton University), S. Erikson, M. Trupke and E. Hinds (Imperial College London)
o 2137 Monitoring of Instant-Mask Plating for Fabrication of Patterned Copper Microstructures G. Zhang (Echemics)
o 2138 Complimentary Nano-Electromechanical Carbon Nanotube Switches M. Tabib-Azar (Case Western Reserve University), S. Bhunia and D. Saab (CWRU)
 

Wednesday, November 1, 2006

Universal 5, 1st Floor, Expo Center

Microfabrication and MEMS

Co-Chairs: P. Hesketh and J. Davidson
TimeAbs#Title and Authors
08:40 Introductory Remarks (10 Minutes)
08:50 2139 Surface and Materials Issues for High Reliability MEMS R. Maboudian (UC Berkeley)
09:40 2140 Non-Volatile Solid-Electrolyte Memory Devices: Electronic versus Optical Latent Image Formation in Silver Halides M. Tabib-Azar (Case Western Reserve University) and Y. Xie (CWRU)
10:00 Intermission (20 Minutes)
10:20 2141 High-Rate Anisotropic Silicon Etching with the Expanding Thermal Plasma Technique M. A. Blauw (Eindhoven University of Technology), P. Van Lankvelt (Philips Research Eindhoven), F. Roozeboom (NXP Research), E. Kessels and R. van de Sanden (Eindhoven University of Technology)
10:40 2142 Exposure of Thick Polymethylglutarimide Films for Structural MEMS I. G. Foulds, R. W. Johnstone, S. H. Tsang and M. Parameswaran (Simon Fraser University)
11:00 2143 Novel Electrochemical Patterning Method of Silicon Carbide G. A. D'Arrigo, V. Raineri, S. Di Franco and C. Spinella (cnr-imm)
11:20 2144 Diamond/Carbon Field Emission Based Structures for Sensors and MEMS J. L. Davidson, W. Kang, Y. Wong and K. Subramamium (Vanderbilt University)
11:40 2145 Control of Residual Stress in Large-scale LPCVD SiC Films for MEMS and NEMS Applications C. S. Roper (UC Berkeley), R. T. Howe (Stanford University) and R. Maboudian (UC Berkeley)
 

Microactuators and Microfluidic Devices

Co-Chairs: R. Maboudian and J. Li
TimeAbs#Title and Authors
14:00 2146 Electrodeposited Micro-Actuators A Simple Tool for Impedance-Based Sensing E. T. Enikov (University of Arizona)
14:40 2147 Scalable Microfabricated High Torque Mechanical Micromotors M. Tabib-Azar (Case Western Reserve University) and L. You (CWRU)
15:00 2148 MEMS Capacitive Switch Fabrication using Photodefinable Metal Oxide Dielectrics C. Henderson, M. Romeo, G. Wang and J. Papapolymerou (Georgia Institute of Technology)
15:20 2149 Micromechatronical Challenges Miniaturizing Valves E. Kallenbach (Steinbeis Transfer Center Mechatronic Ilmenau), M. Kallen-bach (Technical University of Ilmenau) and V. Zoeppig (Steinbeis Transfer Center Mechatronic Ilmenau)
15:40 Intermission (20 Minutes)
16:00 2150 Metal-Catalyzed Carbon Nanotube Piezoresistors with Very Large Longitudinal Piezoresistivity M. Tabib-Azar (Case Western Reserve University), Y. Xie and R. Wang (CWRU)
16:20 2151 Pushing Capillary Electrophoresis in Chip Format into the Low Cost Region W. E. Hoffmann, H. Mühlberger, H. Demattio (Research Center Karlsruhe), B. Gas (Charles University Prague) and A. E. Guber (Research Center Karlsruhe)
16:40 2152 Easy Fabrication of Microfluidic Device Using Photosensitive Sheet T. Ito (Kanagawa Industrial Technology Center), K. Maruyama (Faculty of Science and Technology, Keio University), S. Ohya (Kanagawa Industrial Research Center) and K. Suzuki (Faculty of Science and Technology, Keio University)
17:00 2153 Integrated Electrical Sensor Arrays in Microfluidic Networks M. C. Cole and P. J. Kenis (University of Illinois at Urbana-Champaign)
17:20 2154 Photodefinable Sacrificial Polycarbonate Materials & Methods for MEMS & Microfluidic Device Fabrication C. Henderson and Y. Hua (Georgia Institute of Technology)
17:40 2155 Characterization of a Polymer-Based Microfluidic System for Electrophysiological Studies E. Moss, N. Reddy and A. Frazier (Georgia Institute of Technology)
 

Thursday, November 2, 2006

Universal 5, 1st Floor, Expo Center

Microsensors

Co-Chairs: M. Tabib-Azar and C. Roper
TimeAbs#Title and Authors
08:20 2156 CMOS-Based Microsensors O. Brand (Georgia Institute of Technology)
09:00 2157 MEMS Arrayed Scanning Probes for Soft Nanolithography C. Liu (University of Illinois at Urbana) and S. Li (University of Illinois)
09:20 2158 Low-Noise Chemical Detection with a Piezoresistive Microcantilever Array P. J. Hesketh, A. Choudhury (Georgia Institute of Technology), Z. Hu and T. Thundat (Oak Ridge National Laboratories)
09:40 Intermission (20 Minutes)
10:00 2159 Versatile MEMS Sensor Array Platform J. R. Stetter (SRI International), G. Chung and W. Buttner (IIT)
10:40 2160 A Wireless Portable Carbon Nanotube-Based Chemical Sensor System J. Li (NASA Ames Research Center), Y. Lu (Eloret Corporate at NASA Ames Research Center), J. Calusdian, X. Yun (Naval Postgraduate School) and M. Meyyappan (NASA Ames Research Center)
11:00 2161 Effect of Electrode Geometry on Response Time Modulation of Nano-Micro Integrated Room Sensor S. Deshpande, P. Zhang, H. Cho and S. Seal (University of Central Florida)
11:20 2162 A Carbon Nanotube Sensor Array for Sensitive Gas Discrimination Using Principal Component Analysis Y. Lu (Eloret Corporate at NASA Ames Research Center) and J. Li (NASA Ames Research Center)
11:40 2163 Arrayed Nanostructured Titania Functionalized For Hydrogen Sensing A. J. Monkowski (UC Santa Barbara), A. R. Morrill (UNIVERSITY OF CALIFORNIA SANTA BARBARA) and N. MacDonald (UC Santa Barbara)