239th ECS Meeting with IMCS Topic Close-up: Plasma and Thermal Processes for Materials Modification, Synthesis, and Processing 3

Topic Close-up #9

Symposium D02 – Plasma and Thermal Processes for Materials Modification, Synthesis, and Processing 3

Deadline for submitting abstracts: December 18, 2020
Submit today!

Symposium focus: Symposium D02 encourages researchers to exchange the latest results on the formation of nanostructures for integrated circuits, optoelectronic and MEMS devices, as well as sensors and photovoltaic elements. Examples of these nanostructures are advanced transistor and memory devices, nanowires, nanotubes, QDOTs, and 2-D materials. Techniques which have enjoyed extensive success in microelectronics processing have been applied to the synthesis and production of nanostructured elemental and compound semiconductor materials such as Si, Ge, ZnO, Zn3P2, Zn4Sb3, GaN, InN, GaSb and many others. The topics for this symposium also include surface functionalization, photoresist removal, atomic layer etching, difficult-to-etch materials, decontamination, pollution abatement, as well as surface treatments in health care and displays. Papers focusing on material growth or etch mechanisms, modeling, reactor design, process diagnostics, materials characterization, and advances in novel applications are strongly encouraged.

Please check out the call for papers for more details


All content provided in the ECS blog is for informational purposes only. The opinions and interests expressed here do not necessarily represent ECS's positions or views. ECS makes no representation or warranties about this blog or the accuracy or reliability of the blog. In addition, a link to an outside blog or website does not mean that ECS endorses that blog or website or has responsibility for its content or use.