Topic Close-up #9
Symposium D02 – Plasma and Thermal Processes for Materials Modification, Synthesis, and Processing 3
Deadline for submitting abstracts: December 4, 2020
Symposium focus: Symposium D02 encourages researchers to exchange the latest results on the formation of nanostructures for integrated circuits, optoelectronic and MEMS devices, as well as sensors and photovoltaic elements. Examples of these nanostructures are advanced transistor and memory devices, nanowires, nanotubes, QDOTs, and 2-D materials. Techniques which have enjoyed extensive success in microelectronics processing have been applied to the synthesis and production of nanostructured elemental and compound semiconductor materials such as Si, Ge, ZnO, Zn3P2, Zn4Sb3, GaN, InN, GaSb and many others. The topics for this symposium also include surface functionalization, photoresist removal, atomic layer etching, difficult-to-etch materials, decontamination, pollution abatement, as well as surface treatments in health care and displays. Papers focusing on material growth or etch mechanisms, modeling, reactor design, process diagnostics, materials characterization, and advances in novel applications are strongly encouraged.
Please check out the call for papers for more details