201st Meeting - Philadelphia, PA
May 12-17, 2002
PROGRAM INFORMATION
AK1 - Microfabricated Systems And MEMS VI
Sensor/Dielectric Science and Technology/Electronics
Tuesday, May 14, 2002
Franklin Hall, Level 4
Co-Chairs: P.J. Hesketh and J.L. Davidson
Wednesday, May 15, 2002
Salon I, Level 5
Gas Sensors
Co-Chairs: P.J. Hesketh and J.L. Davidson
Time | Abs# | Title |
8:25 | |
Introductory Remarks-Hesketh - |
8:30 | 1538 |
An Assessment of Microfabricatopn to Sensor Development and the Integration of the Sensor Microsystem - C.-C. Liu, E. O'Connor,
K.P. Strohl, K.P. Klann, G.A. Ghiurcan (Case Western Reserve University), G. Hunter (NASA/Glenn Research Center), L.
Dudik, and M.J. Shao (Case Western Reserve University) |
9:10 | 1539 |
Rapid, Reversible, Sensitive, and Inexpensive Porous Silicon Gas Sensor - L. Seals, L.A.
Tse, P.J. Hesketh, and J.L. Gole (Georgia Inst. of Technology) |
9:40 | 1540 |
A Micromachined Planar Pellistor Using an Electrochemically Deposited Nanostructured Catalyst - P. Bartlett, S.
Guerin, J. Marwan (Southampton University), J. Gardner, S.M. Lee (Warwick University), M. Willett, and S. Leclerc (City Technology Ltd) |
10:00 | 1541 |
Carbon Nanotubes for Gas Sensing Applications -
Y.M. Wong, W.P. Kang, J.L. Davidson, A. Wisitsora-at, and K.L. Soh (Vanderbilt University) |
10:40 | |
Forty-Minute Intermission - |
Salon I, Level 5
Physical Sensors and Fabrication
Co-Chairs: C.C. Liu and H.G. Hughes
Time | Abs# | Title |
1:40 | 1542 |
MEMS Physical Sensors for Automotive Applications - D. Monk (Motorola) |
2:10 | 1543 |
Electrodeposited Magnetic MEMS: From Structures to Actuators -
M.G. Allen (Georgia Institute of Technology) |
2:40 | 1544 |
Piezoresistive Micro-Electro-Mechanical Application in Diamond Films -
K.C. Holmes, J.L. Davidson, and W.P. Kang (Vanderbilt University) |
3:00 | 1545 |
Use of Continuous Hinges and Microrivets to Facilitate the Assembly of Three-Dimensional Polysilicon Microelectromechanical Systems (MEMS) Structures - E.
Kolesar, M. Ruff, W. Odom, S. Ko, J. Howard, and P. Allen (Texas Christian University) |
3:20 | |
Ten-Minute Intermission - |
3:30 | 1546 |
Analytical Results in Nanoscale EMS Modeling -
S.V. Rotkin (UIUC) |
3:50 | 1547 |
Mechanical Design of an Electromagnetic Actuator for a Microvalve -
J.S. Bintoro and P.J. Hesketh (Georgia Inst. of Technology) |
4:10 | 1548 |
Electrophoretic Deposition of the Piezoelectric Polymer P(VDF-TrFE) - J. Foster and R. White (University of California) |
4:30 | 1549 |
Electrodeposited Co-Pt Permanent Micromagnet Arrays on Cu(111)/Si(110) Substrate - I. Zana and G. Zangari (The University of Alabama) |
4:50 | 1550 |
Fabrication of Metal Four-Point- Probe with Tip - H.-J. Shin and
P.J. Hesketh (Georgia Institute of Technology) |
5:10 | 1551 |
Stable TiO_X Sub-Micro-Meter Channels - J. Scarminio
(UEL), E. Rigon, L. Cescato, and A. Gorenstein (Unicamp) |
Thursday, May 16, 2002
Microfluidics
Co-Chairs: M. Madou and D. Monk
Time | Abs# | Title |
8:40 | 1552 |
Rapid Protoyping of Microfluidic Components and Packaging for Microsystems -
P.J. Hesketh, L.A. Tse, D. Rosen, and J.L. Gole (Georgia Institute of Technology) |
9:20 | 1553 |
Limits of Electrochemical Processes at Si Electrodes used at High Field for Aqueous Microfluidic MEMS Applications - M. Rising, K.
Zavadil, and P. Galambos (Sandia National Laboratories) |
9:40 | |
Thirty-Minute Intermission - |
10:20 | 1554 |
MEMS Bubble Actuated Valve for Interstitial Glucose Sensing - T. Schneider, R. White (Science Applications International Corporation), M. Cheng, M.
Paranjape, J. Currie, and J. Garra (Georgetown University) |
10:40 | 1555 |
Printed-Wiring-Board Microfluidics for Thermal Management of Electronic Systems - Y. Wang, S.
Bidstrup, G. Yuan, and M. Allen (Georgia Institute of Technology) |
11:00 | 1556 |
A Bi-directional Microfluidic Driving System - C.-P. Jen, W.-D. Wu, C.-Y. Wu, Y.-C. Lin (National Cheng Kung University), G.-G. Wu, and C.-C. Chang (Kun Shan University of Technology) |
11:20 | 1557 |
Microfabricated Direct Methanol Fuel Cells to Power On-Board Integrated Circuits - C. Moore and P. Kohl (Georgia Institute of Technology) |
11:40 | 1558 |
Fabrication of Deep Large Angle Tapered Trenches for Microelectromechanical Applications - M.
Rattner, C.Y. Mak, R. Guenther, W.R. Merry, and J.D. Chinn (AKT Inc.) |
Chemical and Biosensors
Co-Chairs: J.L Gole and D. Misra
Time | Abs# | Title |
1:40 | 1559 |
Future MEMS Oppurtunities and Challenges in Sciences and Engineering - M. Madou
(Nanogen) |
2:20 | 1560 |
MEMS in Biomedical Applications - Y.-C. Lin, C.-P. Jen, W.-D. Wu, C.-C. Yang, H.-C. Ho, C.-Y. Wu, M. Li, and M.-Y. Huang (National Cheng Kung University) |
2:50 | 1561 |
Micro-Imaging with a Glass-coated Electrode Array - J. Stetter and W. Penrose (Illinois Institute of Technology) |
3:20 | |
Ten-Minute Intermission - |
3:30 | 1562 |
Integrating an Ultramicroelectrode in an AFM Cantilever for In-Situ Imaging of Enzyme Activities - A.
Kueng, C. Kranz, B. Mizaikoff (Georgia Institute of Technology), A. Lugstein, and E. Bertagnolli (Vienna University of Technology) |
3:50 | 1563 |
Stability of Thiol-immobilized DNA on Microcantilever Sensors -
K.A. Stevenson, A. Mehta, K.M. Hansen, and T.G. Thundat (Oak Ridge National Laboratory) |
4:10 | 1564 |
Micro Oxygen Sensor with Redox Cycling - J. Wu and W. Sansen (KU
Leuven) |
4:30 | 1565 |
Boron-doped CVd Diamond Planar Film as an Electrode for Electrochemical Sensing -
K.L. Soh, W.P. Kang, J.L. Davidson, Y.M. Wong, A. Wisitora-at (Vanderbilt University), G. Swain (Michigan State University), and
D.E. Cliffel (Vanderbilt University) |
4:50 | 1566 |
Object Manipulation in Microfluidic Devices - C. Ozkan (University of California) |
|