2001 Published Proceeding Volumes
PV 2001-01 <ISBN
Based Semiconductor Electronic and Optical Devices and State-of-the-Art Program
on Compound Semiconductors XXXIV , F. Ren, D. N. Buckley, S. N. G. Chu,
S. J. Pearton, Washington, DC, Spring 2001, $56 member - $67 nonmember, 328
pages. This volume describes numerous applications that have appeared
for III-nitride based semiconductors, including blue/UV light emitters, high
temperature/high power electronics, and passivation layers for other
semiconductors. The crystal growth, device processing, circuit design, and
applications communities are brought together to discuss basic science and
technology issues related to the utilization of III-nitride based
PV 2001-02 <ISBN
Process Integration II , C. L. Claeys, F. Gonzales, J. Murota, K.
Saraswat, Washington, DC, Spring 2001, $68 member - $82 nonmember. 628 pages. This
proceedings contains the papers from the second international symposium on ULSI
Process Integration. The book reviews different process integration aspects,
including full process integration, front-end-of-line integration, process
integration and defects, novel structures and their CMOS integration, and
application technologies. The present status is outlined, on-going research is
discussed, and prediction made for further technologies in different fields. The
situation compared to the ITRS roadmap, is analyzed in different fields.
PV 2001-03 <ISBN
Technology and Devices X , S. Cristoloveanu, P. L. F. Hemment, K. Izumi,
G. K. Celler, F. Assaderaghi, Y.-W. Kim, Washington, DC, Spring 2001,
$65 member - $78 nonmember, 474 pages. The highlights of this volume are the novel and
significant advances in SOI materials, processing, and components. It is of
marked interest to materials and device scientists, as well as to process and
applications oriented engineers.
PV 2001-04 <ISBN
Methanol Fuel Cells , S. Narayanan, T. Zawodzinski, S. Gottesfeld,
Washington, DC, Spring 2001, $58 member - $70 nonmember, 350 pages.. This book
covers the rapidly emerging technology area of direct methanol fuel cells. The
papers span from fundamental electrochemistry to the design of complete systems.
The volume also covers a variety of application development efforts that range
from fuel cells to automotive fuel cell systems.
PV 2001-05 <ISBN
Application of Surface and Interface Analysis Methods to Environmental Material
Interactions: In Honor of James E. Castle's 65th Year , D. R. Baer, C.
R. Clayton, G. P. Halada, G. D. Davis, Washington, DC, Spring 2001,
$60 member - $72 nonmember, 324 pages. This proceedings presents current or potential
applications of state-of-the-art in situ, and ex situ surface or interface
sensitive analysis methods to studies of environmental/materials interactions
with a focus on both fundamental aspects of the methods and practical
applications, especially those involving new areas (such as microbial induced
corrosion). It also covers advanced materials such as corrosion of submicron
features or nanoscale composites.
PV 2001-06 <ISBN
Issues with Materials and Processes for the Electronics and Semiconductor
Industries IV , L. Mendicino, Washington, DC, Spring 2001,
$52 member, $62 nonmember, 220 pages. Environmental issues, such as climate change,
resource conservation, and chemicals, materials, and equipment management have
become high profile issues in many industry sectors, government organizations,
and the general public. This publication highlights efforts of industry and
academia to proactively address these issues.
PV 2001-07 <ISBN
Nitride and Silicon Dioxide Thin Insulating Films (6th) , K. B. Sundaram,
M. J. Deen, D. Landheer, W. D. Brown, D. Misra, M. D. Allendorf, R. E. Sah,
Washington, DC, Spring 2001, $56 member - $67 nonmember, 286 pages. A
multitude of topics are discussed in this volume, such as film preparation, film
and substrate interface analysis by novel techniques, as well as passivation,
charge transport, and trapping. Also covered are tunneling phenomena and
dielectric breakdown, defects, and impurities. Included as well are electrical,
physical, chemical, and optical properties and multilayer dielectric layers,
stacks, and interfaces. In addition, this volume discusses plasma processing,
rapid thermal process oxidation, nitridation, isolation techniques, and
PV 2001-08 <ISBN
1-56677-324-8>Morphological Evolution of Electrodeposits -and- Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV , P. C. Allongue, P. C. Andricacos, F. Argoul, D. P
Barkey, J. C. Bradley, K. Kondo, P. C Searson, C. Reidsma-Simpson, J. L
Stickney, G. M. Oleszek, Washington, DC, Spring 2001, $66 member -
$79 nonmember. Morphology evolution encompasses electrochemical processing
in ULSI fabrication, shape evolution, growth habit, and microstructure of
electrodeposits. The most prominent example at present is the electrochemical
deposition of copper for ULSI interconnects. Many other electrochemical
processes at various stages of emergence and development hold promise for the
electronics industry and beyond.
PV 2001-09 <ISBN
Thermal and Other Short-Time Processing Technologies II , D. L. Kwong,
K. Reid, M. C. Ozturk, P. J. Timans, F. Roozeboom, Washington, DC,
Spring 2001, $62 member - $74 nonmember, 450 pages. This volume contains the latest
developments in rapid thermal, and other short-time processing technologies,
with emphasis on CMOS gate stack, source/drain, and channel engineering. Besides
conventional RTP technologies such as RTA, RTO, and RTCVD, equipment and
modeling issues, this book contains applications such as UV laser and shock wave
assisted processing in annealing, and doping. Also included are thin-film
deposition techniques such as short-time UHV-CVD, MBE, and sputtering.
PV 2001-10 <ISBN
for the 21st Century , V. K. Kapur, R. D. McConnell, D. Carlson, G. P.
Caesar, A. Rohatgi, J. Smith, Washington, DC, Spring 2001, $52
member - $62 nonmember. 425 pages. This volume focuses on non-conventional
technologies that are not being used in the photovoltaics industry today, but
could be used in the 21st century. Papers, both fundamental and applied in
nature, leading to maximum, cost-effective, utilization of solar energy for
electric power generation are included.
PV 2001-11 <ISBN
for the New Millennium, Volume 11 , K. M. Kadish, P. V. Kamat, D. Guldi,
Washington, DC, Spring 2001, $78 member - $94 nonmember. 614 pages. This
proceedings volume presents recent advances in the area of fullerenes, carbon
nanotubes, and carbon nanoclusters. Topics included are ESR, fullerene
functionalization, photophysics, photochemistry, thermodynamics, solid-state
physics, endofullerenes, and biomedical applications.
PV 2001-12 <ISBN
Temperature Corrosion and Materials Chemistry III , E. J. Opila, M. J.
McNallan, D. A. Shores, D. A. Shifler, Washington, DC, Spring 2001,
$60 member - $72 nonmember, 372 pages. This volume focuses on development of
theoretical models for predicting thermodynamic and kinetic aspects of high
temperature reactions, fundamental aspects of oxidation and corrosion, and
thermodynamic and kinetic studies of vaporization of inorganic materials. Also
covered is the response of protective coatings to high temperatures,
thermodynamic property measurements of inorganic materials, and fundamental
studies of sold-state interdiffusion and reactions.
PV 2001-13 <ISBN
Gas-Phase and Surface Chemistry of Vapor Deposition II/Process Control,
Diagnostics and Modeling in Semiconductor Manufacturing IV , M. D.
Allendorf, M. T. Swihart, M. Meyyappan, Washington, DC, Spring 2001,
$81 member - $97 nonmember, 506 pages. This volume presents state-of-the-art research
in vapor-phase synthesis and processing of materials, with emphasis on gas-phase
and surface chemistry and their effects on growth/etching rates and material
properties. Materials considered include semiconductors, oxides, diamonds,
metals, ceramics, and superconductors. Topics also include computation and
measurement of fundamental rate parameters of reactions, reactor modeling and
optimization, in situ diagnostics, and new precursor development.
PV 2001-14 <ISBN
Intermediates in Organic and Biological Electrochemistry In Honor of the Late
Professor Eberhard Steckhan , J. Yoshida, D. G. Peters, M. S. Workentin,
Washington, DC, Spring 2001, $68 member - $82 nonmember, 188 pages. This
proceedings volume contains a set of original papers describing recent progress
in the generation and use of reactive intermediates (cations, cation radicals,
free radicals, anion radicals, anions, and transition-metal species) for
electro-organic synthesis. In addition, mechanistic features of these processes
PV 2001-15 <ISBN
Chemical Sensing 8/Olfaction and the Electronic Nose-ISOEN 2001 , J.
Stetter, W. R. Penrose, Washington, DC, Spring 2001, $68 member -
$82 nonmember, 230 pages. Electronic noses are combinations of sensor arrays and
pattern classifiers, which can be used to compare ill-defined volatile samples,
such as odors and flavors. These authors are finding new applications and
developing systems with improved selectivity, sensitivity, and stability.
PV 2001-16 <ISBN
Oxide Fuel Cells VII , H. Yokokawa and S. C. Singhal, Tsukuba,
Japan, June 2001, $82 member - $98 nonmember, 1,120 pages. This is the seventh volume in
the continuing biennial series of proceedings of the International Symposia on
Solid Oxide Fuel Cells. This volume contains papers dealing with the materials
for cell components, fabrication methods for components and complete cells. Also
contained in this volume are cell electrochemical performance and modeling,
stacks and systems, and field testing of SOFC demonstration units.
Semiconductor Technology (ISTC 2001) , M. Yang, PV 2001-17, Shanghai,
China, May 2001, Please contact ECS for availability. This volume covers
almost all areas of semiconductor fabrication technology and reports most new
research results about new devices, SOI, Cu, CMP, low-k material, high-k
material, plasma etching, photolithography, thin films, plasma damage, and IC
and Biological Sensors and Analytical Methods II , M. A. Butler, P.
Vanysek, N. Yamazoe, PV 2001-18 San Francisco, California, Fall 2001, $82 member
- $98 nonmember. This volume is a collection of papers presented at a
five-day symposium covering many aspects of sensors and analytical chemistry and
biochemistry, extending past the boundaries of pure electrochemistry. This
symposium, occurring approximately every other year, is the flagship symposium
of the Sensor Division. It offers a good cross section of current topics in
sensing and analysis in chemistry and biology.
Confinement: Nanostructured Materials and Devices , M. Cahay, J. P
Leburton, D. J. Lockwood, S. Bandyopadhyay, J. S. Harris, PV 2001- 19, San
Francisco, California, Fall 2001, $64 member - $77 nonmember. This
proceedings volume addresses recent developments in the area of nanoscale
semiconductor, metallic, and organic structures. Emphasis is placed on quantum
effects and single electron storage in small-scale silicon and III-V compound
structures and devices. Also covered are fundamental issues in luminescent
physics and the chemistry of new classes of phosphor and porous materials,
including both atomic and molecular structures.
Program on Compound Semiconductors XXXV , P. C. Chang, S. N. G. Chu, D.
N. Buckley, PV 2001-20, San Francisco, California, Fall 2001, $52 member - $62
nonmember. The focus of this volume addresses the most recent developments
in compound semiconductors encompassing advanced devices, materials, growth,
characterization, processing, device fabrication, reliability, and other related
topics. Contained in this volume are papers on both practical issues and
Advanced Batteries and Super Capacitors , G. Nazri, R. Koetz, B. Scrosati,
P. A. Moro, E. S. Takeuchi, PV 2001-21, San Francisco, California, Fall 2001,
$98 member - $118 nonmember. This book provides the current knowledge about
various advanced batteries for medical, consumer electronic, and transportation
applications. It includes state-of-the-art advanced lithium batteries, nickel
metal hydride, lead-acid, metal-air batteries, and several classes of
supercapacitors. Battery components are explored and performance at cell module
and pack levels is discussed. The science and technology of electrode materials,
and new progress made in the area of liquid and solid electrolytes, are also
and Corrosion Protection , J. D. Sinclair, R. P. Frankenthal, E. Kalman,
and W. Plieth, PV 2001- 22, San Francisco, California, Fall 2001, $90
member - $108 nonmember. This volume covers the fundamental and engineering
aspects of corrosion and protection of metals, alloys, semiconductors,
components, and structures. Also included are passivity and its breakdown,
inhibitors, localized corrosion, noise measurement, and statistical analysis of
localized corrosion. Other topics of interest in this book are optical,
electronic, mechanical, and chemical properties of passive films, high
temperature oxidation, reliability of gate oxides and interlevel dielectrics of
semiconductor devices, and of other electronic components.
and Electrochemical Processes for a Cleaner Environment , E. W. Brooman,
C. M. Doyle, C. Cominellis, J. Winnick, PV 2001-23, San Francisco, California,
Fall 2001, $70 member- $84 nonmember. For a sustainable economy it is
important that resources are used efficiently and with no detrimental effects on
the environment. This proceedings volume collects together a wide range of
papers that support this goal, with an emphasis on electrochemical approaches
and technology. Topics range from process development and cell design, to
materials optimization for the production of gases, metals, and industrial
chemicals, and include efficient energy conversion and storage devices.
Film Materials, Processes, and Reliability in Microelectronics , G. S.
Mathad, M. Yang, M. Engelhardt, H. S. Rathore, B. C. Baker, R. L. Opila, PV
2001-24, San Francisco, California, Fall 2001, $54 member - $65 nonmember. Interests
contained in this volume are plasma patterning of low- and high-k films and
control of surface and device damage by plasmas in the fabrication of ULSI
devices and circuits. Both etching and deposition processes are included, as
well as the practice of multi-level metal (MLM) interconnections using copper
and low-k dielectric films used in ULSI circuits.
Diamond Materials VII , G. M. Swain, T. Ando, J. C. Angus, W. D. Brown,
J. L. Davidson, A. Gicquel, W. P. Kang, B. V. Spitsyn, PV 2001-25, San
Francisco, California, Fall 2001, $60 member - $ 72 nonmember. This
proceedings volume contains some of the most recent work in the field of diamond
and diamond-like carbon thin film technology. Specifically, work in the fields
of nucleation, growth mechanisms, structure-junction relationships, doping
processes, surface and bulk characterization, and electrochemistry are included.
Technology in Semiconductor Device Manufacturing VII , J. Ruzyllo, R.
Novak, T. Hattrori, R. Opila, PV 2001-26, San Francisco, California, Fall 2001,
$64 member - $77 nonmember. This volume contains a range of topics related
to the removal of contaminants from silicon surfaces, as well as topics related
to surface conditioning prior to critical deposition steps. Specific cleaning
methods used in front-end and back-end cleaning operations are discussed.
Semiconductor Wafer Bonding Science: Technology and Applications , H.
Baumgart, C. E. Hunt, PV 2001-27, San Francisco, California, Fall 2001, $60
member - $72 nonmember. This book covers the state-of-the-art R&D
results of the last two years in the field of semiconductor wafer bonding
technology. Wafer bonding technology can be used to create novel composite
materials and devices that would otherwise be unattainable. Wafer bonding today
is rapidly finding application in such diverse fields as photonics, sensors,
MEMS, X-ray optics, high performance power electronics, non-electronic
microstructures, and SOI.
and Mixed Conducting Ceramics IV , T. A. Ramanarayanan, W. L. Worrell,
M. Mogensen, PV 2001-28, San Francisco, California, Fall 2001, $68 member - $82
nonmember. This proceedings volume is a compilation of papers presented at
the Fourth International Symposium on Ionic and Mixed Conducting Ceramics. These
ceramic materials have attracted researchers worldwide because of their many
technological applications. The present symposium volume contains papers that
describe forefront research in several topics such as ionic transport in solid
electrolytes, mixed conduction in ceramics, hydrocarbon conversion by ceramic
electrochemistry, ceramics-based fuel cells, batteries, thin film ceramic
membranes, and many others. For the serious researcher and the student active in
these areas, this volume is a must.
Defects and Contamination, Their Impact and Control in Device Manufacturing III
(DECON 2001) , B. Kolbesen, C. Claeys, P. Stallhofer, F. Tardif, PV
2001-29, Nuremberg, Germany, September, 2001, $59 member - $71 nonmember. This
book contains the latest developments and evolution related to crystalline
defects and contamination with focus on their impact and control in device
manufacturing. Papers included in this volume cover growth in progress and
radiation-induced defects, characterization and monitoring techniques, impact on
device characterization and yield, and strategies and measures for the reduction
of defect and contamination levels.
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