ECS Meeting Short Course
Thin film transistors (TFTs) and MOSFETs (metal–oxide–semiconductor field-effect transistors) are two solid state devices critical to the two largest electronic industries, i.e., flat panel displays and integrated circuits. There is a necessity to introduce the fundamental science updated technology developments to scientists and engineers who are working or interested in exploring opportunities in this kind of device. The amorphous silicon TFT has been the backbone of large area active matrix liquid crystal displays. However, its low field effect mobility greatly limits applications on many high speed displays and electronic products. The oxide TFT has emerged as the leading device for these products.
The ECS TFT symposium series has been held for 32 years, which makes it the longest continuously held TFT meeting in the world. In this short course, leading experts in the world review fundamental principles and limitations on fabrication processes and applications of oxide TFTs. Future trends in fabrication and applications are also discussed.
- Fabrication process in oxide TFTs
- Sputter and CVD processes
- Solution and other processes
- Issues in manufacturing
- Applications of oxide TFTs
- Uniqueness in technology
- Demonstrated applications
- Future applications and bottlenecks
About the instructors
Jin Jang is a Distinguished Professor in the Department of Information Display at Kyung Hee University and Director of the Advanced Display Research Center (ADRC). His current research focuses on oxide and LTPS TFTs for displays; TFT circuits and TFT application to sensors; and Micro-LED and flexible AMOLED. Prof. Jang invented the first full-color AMLCD on plastic substrate, flexible AMOLED, and some new device structures using oxide semiconductors. Dr. Jang received a BS in Physics at Seoul National University and his PhD in Physics from the Korea Advanced Institute of Science and Technology. He is the author or co-author of over 1,000 technical publications of which over 600 are in journals such as Nature, Advanced Materials, Advanced Functional Materials, Energy Environmental Science, ECS Solid State Letters, Applied Physics Letters, IEEE Electron Device Letters and Transactions on Electron Devices. Over the last 10 years, Prof. Jang has published over 100 journal papers. He served as General Chair of the 2012 and 2013 International Meetings on Information Display; General Chair of the 2009 Society for Information Display (SID) Display Week; and Program Chair of the 2007 SID Symposium. He is a Fellow of the Society for Information Display and received the 2017 Samsung Ho-Am Award; 2015 SID Slotto Owaki Prize; and 2012 IEEE George Smith Award.
Yue Kuo is Nesbitt Professor of Chemical Engineering with a joint appointment in Electrical Engineering, and Materials Science and Engineering, at Texas A&M University, where he established the Thin Film Nano & Microelectronics Research Laboratory. An outstanding researcher and technology leader whose work has greatly contributed to the advancement of solid state science and technology as well as industry production, Prof. Kuo is one of the few thin film and semiconductor experts who combines extensive industry experience (e.g., IBM T. J. Watson Research Center and Semiconductor Division of Data General) with academic experience.
Prof. Kuo received a BS from National Taiwan University, and MS and PhD from Columbia University. He has edited 41 journals and conference proceedings, six TFT short course books, and coauthored two TFT textbooks. Thirty two years ago, he founded and continues as key organizer of the ECS TFT symposium, the world’s longest continuously held TFT symposium series—as well as being involved for 14 years with the ECI ULSIC vs. TFT International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors. He is a Fellow of The Electrochemical Society; Institute of Electrical and Electronics Engineers; American Vacuum Society; and Material Research Society. Prof. Kuo has received awards and honors including the ECS Gordon E. Moore Medal for Outstanding Achievement in SSS&T, and Electronics and Photonics Division Award; Pan Wen Yuan Foundation Distinguished Research Award; 10 IBM technology and invention awards; Texas A&M research and innovation awards; and distinguished professor appointments at Osaka University, Waseda University, and National Chiao Tung University.