214th ECS Meeting - Honolulu, HI

October 12 - October 17, 2008

PROGRAM INFORMATION
 

J2 - Microfabricated and Nanofabricated Systems for MEMS/NEMS 8

Sensor/Dielectric Science and Technology/Physical and Analytical Electrochemistry/Electronics and Photonics
 

Monday, October 13, 2008

Tapa 3; Tapa Conference Center, Hilton Hawaiian Village

Sensors and Biosensors

Co-Chair(s): W. Hoffman and Jing Li
TimeAbs#Title and Authors
16:20   3157   Applications of Microfabricated and Nanofabricated Systems toward Cancer Diagnosis L. A. Nagahara (National Cancer Institute)
17:00   3158   Layer-by-Layer Nano Self-Assembly of pH Sensors Based on Polyelectrolytes and Carboxylated Carbon Nanotubes D. Lee and T. Cui (University of Minnesota)
17:40   3159   Control of Cellular Adhesion within Microfluidic Device using Electrochemical Biolithography and Dielectrophoresis for Cell-Based Assay M. Hashimoto, H. Kaji and M. Nishizawa (Tohoku University)
 

Tuesday, October 14, 2008

Sea Pearl 3; Mid-Pacific Conference Center, Hilton Hawaiian Village

Fabrication Processes

Co-Chair(s): Tianhong Cui and Peter J. Hesketh
TimeAbs#Title and Authors
13:40   3160   The Role of Organic Additives in the Localized Copper Plating: Flat, Dish, and Domed Shape Copper Bumps L. Castoldi, A. Lodi and G. Visalli (STMicroelectronics s.r.l.)
14:00   3161   Effect of Photoinduced Surface Variation on Wettability Conversion of Titanium Dioxide N. Arimitsu, N. Akira, K. Yoshikazu and K. Okada (Tokyo Institute of Technology)
14:20   3162   Cleaning of Gold Interconnection Surface by Low-temperature Hydrogen Annealing for MEMS Device Fabrication T. Sakata, K. Kuwabara, K. Ono, N. Sato (NTT), K. Machida (NTT-AT) and H. Ishii (NTT)
14:40   3163   HF Vapor Release Assessment to Address NEMS Applications L. Lachal, S. Auclair, P. Lavios, J. Finet, R. Assidi, M. Klein, F. Delaguillaumie, C. Marcoux, P. Andreucci, H. Grange, A. Berthelot, R. Santanta, E. Lajoinie, O. Louveau and J. Chiaroni (CEA)
15:00   3164   Silicon Dry Etching Process for High Topography Sub-micro and Nano-devices A. De Luca, F. Ritton, M. Gelly (CEA LETI MINATEC), J. Buckley (CEA) and M. Heitzman (CEA LETI MINATEC)
15:20   3165   Mechanical Properties of Polycrystalline Silicon formed by Al-2%Si Induced Crystallization J. Lai and T. King Liu (University of California, Berkeley)
15:40 Intermission (20 Minutes)
 

Sensors and Fluidic Devices

TimeAbs#Title and Authors
16:00   3166   Rapid and Selective Chemical Detection Using a Metal-Organic Framework-Functionalized Microcantilever M. D. Allendorf, R. Houk (Sandia National Laboratories), L. Andruszkiewicz, A. Choudhury, K. Gall and P. Hesketh (Georgia Institute of Technology)
16:20   3167   Electrostatic Microvalves for Integrated Microfluidics J. Tice, A. Desai (University of Illinois, Urbana-Champaign), C. Apblett, G. Ten Eyck, R. Givler (Sandia National Laboratories) and P. Kenis (University of Illinois, Urbana-Champaign)
16:40   3168   High Aspect Ratio Semiconducting Nanowires Synthesis using Lithographically Patterned Nanowires Galvanic Displacement (LPNGA) H. Jung (university of california, riverside), B. Yoo (Division of Materials and Chemical Engineering Hanyang University), Y. Rheem (University of California, Riverside), N. Chartuprayoon (Department of chemical engineering and environmental engineering, University of California, Riverside), K. Lee (Electrochemical Processing Group, Korea Institute of Machinery & Materials) and N. Myung (Department of chemical engineering and environmental engineering, University of California, Riverside)
17:00   3169   Large-Scale Polycrystalline SiC Micromachining Technologies C. Roper (HRL Laboratories, LLC), R. Howe (Stanford University) and R. Maboudian (University of California, Berkeley)
17:20   3170   The Development of Metal Oxide Chemical Sensing Nanostructures G. Hunter (NASA Glenn Research Center), R. Vander Wal (USRA at NASA Glenn Research Center), J. Xu, L. Evans (NASA Glenn Research Center) and G. Berger (USRA at NASA Glenn Research Center)
17:40   3171   Nanowires Synthesis and Characterization for Their Chemical Sensor Application J. Li, Y. Lu (NASA Ames Research Center) and J. Deepak (San Jose State University)
 

Coral Exhibit Hall, Mid-Pacific Conference Center, Hilton Hawaiian Village

Poster Session

Co-Chair(s): Peter J. Hesketh
TimeAbs#Title and Authors
o   3172   Fabrication of X-ray Grating Using X-ray Lithography Technique D. Noda, H. Tsujii, N. Takahashi and T. Hattori (University of Hyogo)
o   3173   Enhancement of Thermal Properties of Polymer-Coated Noble Metal Nanoparticles Using Plasmid DNA T. Endo, Y. Yanagida and T. Hatsuzawa (Tokyo Institute of Technology)
o   3174   Evaluation of Alkyl-chain-length Dependency for Localized Surface Plasmon Resonance Optical Characteristics Y. Kawakami, T. Endo, Y. Yanagida, T. Hatsuzawa (Tokyo Institute of Technology) and E. Tamiya (Osaka University)
o   3175   Evaluation of Cell Adhesion Characteristics on the Porous Silicon Substrates with Various Surface Structures Y. Yanagida, S. Naito, Y. Tanaka, T. Endo and T. Hatsuzawa (Tokyo Institute of Technology)
o   3176   Comparison of a Microfluidic Gas-Intake Devices with Pillar-Type and Microfluidic Membrane-Type Structures M. Amano (Waseda University), T. Arakawa, H. Sato, T. Sekiguchi (Graduate School of advanced Science and Engineering, Waseda University), S. Shoji (Waseda University), H. Kudo, H. Saito and K. Mitsubayashi (Tokyo Medical and Dental University)